The turbo molecular pump is developed to obtain a clean large-volume ultra-high vacuum environment.Its successful development has formed a series of turbo molecular pump products of Chengdu Wuji Vacuum Technology Co., Ltd. and a clean ultra-high vacuum environment for a larger volume vacuum system Provide means.
Main innovations:
1. Changed the past method of molecular pumps relying on imitation design. Based on the statistical design of theoretical design, a computer software program was established to optimize the calculation of complex combined blade design parameters, select the best structure, and use the least level. Number, the most reasonable angle combination to obtain the best design index.
2. To achieve the design requirements, the blade processing must use an optically sealed milling method, so it is necessary to solve the reasonable arrangement of the process during the processing, the preparation of special tools, and the reasonable arrangement of heat treatment procedures.
3. Solve the precise dynamic balance of the large turbine rotor. The turbo molecular pump has been applied to high-energy physics. Astronautics technology. Semiconductor device physics. Vacuum coating. Stainless steel thermos bottle manufacturing, etc. With the domestic scientific research and industrial development, a certain number of large Pumping speed turbo molecular pump.
parameter:
Ultimate pressure: l × l0-5Pa
Pumping speed: 4000 l / s
Rotation speed: 16000 r / min
Motor power: 1.5KVA
Startup time: 20min
Parking time: 40min
Inlet flange: DN400KF
Outlet flange: DN1OOKF
Pump height: 400mm
Features:
The largest domestic pumping molecular pump;
Variable cross-section blades with high strength;
Long bearing life;
Adjustable speed;
Unique design, bearing can be replaced on site;
Low-profile pump to save space;
Suitable for obtaining clean high vacuum.
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